Yttria stabilized zirconia (YSZ) films with the thickness of up to 12 μm were prepared on alumina and NiO-YSZ substrates by electron beam physical vapor deposition (EB-PVD). The films showed nano-scaled columnar structures depending on the substrate temperature. Electrical conductivity of the YSZ films on alumina was also investigated at the temperature between 700 and 1000oC in oxidizing atmosphere. High activation energy of the conductivity (>1.03eV) indicated that the conduction via grain boundary controlled the ionic conduction in the films prepared by EB-PVD. La0.6Sr0.4CoO3-δ as a cathode was applied on the YSZ/NiO-YSZ in order to evaluate the performance of the YSZ electrolyte.