Paper Title:
Preparation of Lead-Free Multi-Layered Piezoelectric Actuator
| Periodical | Key Engineering Materials (Volume 320) |
|---|---|
| Main Theme | Electroceramics in Japan IX |
| Edited by | Keiichi Katayama, Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages | 11-14 |
| DOI | 10.4028/www.scientific.net/KEM.320.11 |
| Citation | Tomoaki Futakuchi et al., 2006, Key Engineering Materials, 320, 11 |
| Online since | September, 2006 |
| Authors | Tomoaki Futakuchi, Tatsunori Kakuda, Yuichi Sakai, Masatoshi Adachi |
| Keywords | Actuator, Ba(Ti,Zr)O3, Multi-Layer, Ni Electrode, Piezoelectricity |
| Price | US$ 28,- |
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Abstract
[BaO]m(Ti0.975Zr0.025)O2 ceramics with Ni electrodes were prepared by a firing in N2 atmosphere. The dielectric, ferroelectric and piezoelectric properties were examined in terms of the composition. The remanent polarization of 9.5μC/cm2 was obtained for m=1.01 by the addition of 0.5wt% SiO2. The longitudinal piezoelectric constant d33 calculated from a unipolar signal (8kV/cm,10Hz) was 430pC/N. Lead-free multi-layered piezoelectric actuators were fabricated using this material by the tape casting, screen-printing of Ni electrodes, laminating under heat and pressure, and firing in N2 atmosphere. The displacement of the actuator with 75μm x 9 active piezoelectric layers was 0.17μm at an applied voltage of 75V and a frequency of 10Hz.
