In Situ Simultaneous Observation of Phase Transition and Electrical Properties of Pb(Zr,Ti)O3 Thin Film by High Temperature XRD and Electrical Measurement Apparatus |
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| Journal | Key Engineering Materials (Volume 320) |
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| Volume | Electroceramics in Japan IX |
| Edited by | Keiichi Katayama, Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages | 53-56 |
| DOI | 10.4028/www.scientific.net/KEM.320.53 |
| Citation | Toru Onoue et al., 2006, Key Engineering Materials, 320, 53 |
| Online since | September, 2006 |
| Authors | Toru Onoue, Naoki Wakiya, Koichi Seo, Takanori Kiguchi, Nobuyasu Mizutani, Kazuo Shinozaki |
| Keywords | High Temperature, Phase Transition, PLD, PZT, Thin Film, X-Ray Diffraction (XRD) |
| Abstract | Pb(Zr0.05Ti0.95)O3/(La,Sr)CoO3 thin films were prepared by pulsed laser deposition (PLD) on SrTiO3(001) substrates. Phase transition behavior of Pb(Zr0.05Ti0.95)O3 (PZT) was investigated using high temperature X-ray diffraction (HT-XRD) and high-temperature electrical measurement. The phase transition temperature of PZT thin film is larger than bulk one. In 100 and 200nm-thickness epitaxial PZT thin films, the phase transition temperatures obtained from X-ray diffraction measurement and electrical property measurement are in good agreement. |
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