Paper Title:
Design and Characterization of Capacitive Micromachined Ultrasonic Transducer
  Abstract

As cMUTs (capacitive Micromachined Ultrasonic Transducer) offer numerous advantages over traditional transducers in terms of efficiency, bandwidth, and cost, they are expected to replace piezoelectric transducers in many applications. In particular, 2D-array cMUTs have aroused great interest in the medical engineering society because of their ability to materialize a true volumetric ultrasonic image. In this study, single element cMUTs with 32 x 32 and 64 x 64 cells were successfully fabricated. The diameter and thickness of the membrane are 35  and 1000 nm, respectively, with a sacrificial layer thickness of 600 nm. The electric characteristics of the fabricated cMUT were measured. Tests on the efficiencies of the cMUT in terms of wave generation and in terms of detection according to the bias and pulse voltage were performed in an air atmosphere.

  Info
Periodical
Key Engineering Materials (Volumes 321-323)
Edited by
Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi
Pages
132-135
DOI
10.4028/www.scientific.net/KEM.321-323.132
Citation
B. Y. Ahn, K. B. Kim, H. W. Park, Y. J. Kim, Y. S. Kwak, "Design and Characterization of Capacitive Micromachined Ultrasonic Transducer", Key Engineering Materials, Vols. 321-323, pp. 132-135, 2006
Online since
October 2006
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Price
$32.00
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