Optically Encoded Smart Dust from DBR Porous Silicon |
| Journal |
Key Engineering Materials (Volumes 321 - 323) |
| Volume |
Advanced Nondestructive Evaluation I |
| Edited by |
Seung-Seok Lee, Joon Hyun Lee, Ik Keun Park, Sung-Jin Song, Man Yong Choi |
| Pages |
53-56 |
| DOI |
10.4028/www.scientific.net/KEM.321-323.53 |
| Online since |
October, 2006 |
| Authors |
Bong Ju Lee,
Sung Gi Kim,
Hong Lae Sohn
|
| Keywords |
Chemical Sensor, DBR Porous Silicon, Red-Shift, Reflectivity, Smart Dust |
| Abstract |
Distributed Bragg reflector (DBR) porous silicons exhibiting unique reflectivity were
successfully obtained by an electrochemical etching of silicon wafer using square wave currents.
Optically encoded smart dust which retained optical reflectivity was obtained from DBR porous
silicon film in organic solution by using ultra-sono method. The size of optically encoded smart dust
was measured by field emission scanning electron micrograph (FESEM) and was about 500 nm to
few microns depending on the duration of sonication. Investigation for the optical characteristics of
smart dust revealed that smart dust could be useful for application such as chemical sensor for
detecting organic vapors. |
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