Paper Title:
Nano-Grating Fabrication Technique
  Abstract

In this paper, a novel nano-moiré grating fabrication technique was proposed for nanometer deformation measurement. The grating fabrication process was performed with the aid of Atomic Force Microscope (AFM) on the basis of micro-fabrication technique. On the analysis of some correlative factors of influencing grating line quality, some important experimental parameters were optimized. In this study, some parallel and cross nano-gratings with frequencies of from 10000lines/mm to 20000lines/mm were fabricated. The successful experimental results demonstrate that the nano-grating fabrication technique is feasible and also indicated that these nano-gratings with nano-moiré method can be applied to deformation measurement, which offers a nanometer sensitivity and spatial resolution.

  Info
Periodical
Key Engineering Materials (Volumes 326-328)
Edited by
Soon-Bok Lee and Yun-Jae Kim
Pages
131-134
DOI
10.4028/www.scientific.net/KEM.326-328.131
Citation
H. M. Xie, Z. W. Liu, M. Zhang, P. W. Chen, F. L. Huang, Q. M. Zhang, "Nano-Grating Fabrication Technique", Key Engineering Materials, Vols. 326-328, pp. 131-134, 2006
Online since
December 2006
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Price
$32.00
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