Paper Title:
Large Displacement Out-Of-Plane Bimorph Actuator for Optical Application
  Abstract

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

  Info
Periodical
Key Engineering Materials (Volumes 326-328)
Edited by
Soon-Bok Lee and Yun-Jae Kim
Pages
1383-1386
DOI
10.4028/www.scientific.net/KEM.326-328.1383
Citation
W. K. Jeung, Y. J. Kim, S. M. Choi, "Large Displacement Out-Of-Plane Bimorph Actuator for Optical Application", Key Engineering Materials, Vols. 326-328, pp. 1383-1386, 2006
Online since
December 2006
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Price
$32.00
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