The behavior of a circular piezoelectric actuator for volumetric micropump has been investigated by using theoretical and finite element analyses. A modified theoretical model was developed to predict the behavior of a piezoelectric actuator induced by the applied voltage. The theoretical results for the diaphragm deflection were in good agreement with the results from numerical simulation. Based on the theoretical analysis, the effects of several important parameters on actuation performance have been investigated. These parameters include the dimensions and mechanical properties of the piezoelectric disk, bonding layer and elastic diaphragm materials. Consequently, it is thought that above theoretical model might be employed as a tool for design and optimization of the piezoelectric actuator for micropump application.