Paper Title:
Static and Dynamic Deformation Measurements of Micro Beams by the Technique of Digital Image Correlation
  Abstract

It is critical to measure the static and dynamic deformation of the micro beam over their full range of voltage and frequency inputs, which are key parameters for predicting device behavior. In this study, full-field technique by correlation of projected fringe patterns is selected to determine static deformation, while dynamic parameters can be obtained by DIC with high-speed CMOS camera, whose maximal frame rate is 32k f/s. The static tests of micro beams are carried out by applying electric field forces under different dc voltage, while the dynamic tests are excited by harmonic excitations. Using the DIC method, the whole field in-plane or out-of-plane displacements of the micro beams are obtained, and hence the dynamic characteristics by post-processing of vibration analysis. Experimental results including the bending deformation and vibration parameters are reported and compared with finite element method. This study verifies the feasibility of this technique to measure both static and dynamic characteristics of MEMS components.

  Info
Periodical
Key Engineering Materials (Volumes 326-328)
Edited by
Soon-Bok Lee and Yun-Jae Kim
Pages
211-214
DOI
10.4028/www.scientific.net/KEM.326-328.211
Citation
X. Y. He, W. Sun, X. Zheng, M. Nie, "Static and Dynamic Deformation Measurements of Micro Beams by the Technique of Digital Image Correlation", Key Engineering Materials, Vols. 326-328, pp. 211-214, 2006
Online since
December 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Ying Jun Sang, Xue Liang Huang
Sensor Technology
Abstract:In this paper, the piezoelectric ceramic electronic voltage transducer principles is researched, a new internal structure of the measurement...
992
Authors: Li Jie Wang, Brad Kinsey
Chapter 3: Material Forming Processes
Abstract:In this paper, digital image correlation (DIC) technology and equipment were applied to research strain distribution of CuZn30 metal sheet...
222