Inverse Method to Determine Mechanical Properties of Thin Film by Nanoindentation and Finite Element Analysis |
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| Journal | Key Engineering Materials (Volumes 326 - 328) |
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| Volume | Experimental Mechanics in Nano and Biotechnology |
| Edited by | Soon-Bok Lee and Yun-Jae Kim |
| Pages | 219-222 |
| DOI | 10.4028/www.scientific.net/KEM.326-328.219 |
| Citation | Dong Cheon Baek et al., 2006, Key Engineering Materials, 326-328, 219 |
| Online since | December, 2006 |
| Authors | Dong Cheon Baek, Soon Bok Lee |
| Keywords | Finite Element Model (FEM), Mechanical Properties, Nanoindentation, Thin Film |
| Abstract | As a reliable tool to measure the Young’s modulus, nanoindention technique has been used widely recently. In this paper, nanoindetation technique was overviewed with its advantage and limitation and a new method was proposed to determine material properties of film, i.e. both Young’s modulus E and Poisson’s ratio ν from load-displacement curve of shallow-depth indentation using ‘inverse method’. |
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