Paper Title:
Effect of Film Thicknesses of TbFe and SmFe on Magnetostrictions for Micro-Wireless Actuators
  Abstract

Silicon based magnetostrictive structures were fabricated for micro-wireless actuators, and finite element models were developed to predict mechanical characteristics of the actuated structures. These structures can be used to design wireless micro-vehicles and multi-function packaged micro-devices. In the fabrication process, amorphous magnetostrictive films of the optimized binary compound Tb0.4Fe0.6 and Sm0.47Fe0.53 were deposited with various thicknesses on the silicon membrane by DC magnetron sputtering using cast composite targets. Magnetic fields lower than 2KOe were applied for micro-system applications. These films have been tested in a simple cantilever arrangement and the predicted magnetostrictions of the actuated membranes through the developed FE models have been calculated.

  Info
Periodical
Key Engineering Materials (Volumes 326-328)
Edited by
Soon-Bok Lee and Yun-Jae Kim
Pages
285-288
DOI
10.4028/www.scientific.net/KEM.326-328.285
Citation
H. S. Lee, C. D. Cho, U. Lee, "Effect of Film Thicknesses of TbFe and SmFe on Magnetostrictions for Micro-Wireless Actuators", Key Engineering Materials, Vols. 326-328, pp. 285-288, 2006
Online since
December 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jun Chuan Niu, C.W. Lim, A.Y.T. Leung
Abstract:This paper presents a higher-order nonlocal plate model and its formulation for bending analysis of nanoplates via variational principle and...
4193
Authors: Massimo Camarda, Ruggero Anzalone, Nicolò Piluso, Andrea Severino, Andrea Canino, Francesco La Via, Antonino La Magna
Chapter 3: Physical Properties and Characterization of SiC
Abstract:Using several characterization techniques (μ-Raman, mechanical profilometer and microstructure deflections) together with a recent stress...
517
Authors: Bing Han, Cheng Zu Ren, X.Y. Yang, Guang Chen
I. Advanced Manufacturing Technology and Equipment
Abstract:The deflection of Aluminum alloy thin-wall workpiece caused by the milling force leads to additional machining errors and reduces machining...
129
Authors: Bai Song Du, Zhong Guo Ma, Ling Luo
Chapter 1: Applied Mechanics and Materials
Abstract:The companion paper presents experimental results and numerical simulation methods to illustrate the behavior of FRP sandwich panels under...
77
Authors: Chang Yull Lee, Ji Hwan Kim
Chapter 9: New Functional Materials
Abstract:The postbucking behaviors of Functionally Graded Material (FGM) plate in hygrothermal environments are investigated. The material properties...
1382