Silicon based magnetostrictive structures were fabricated for micro-wireless actuators, and finite element models were developed to predict mechanical characteristics of the actuated structures. These structures can be used to design wireless micro-vehicles and multi-function packaged micro-devices. In the fabrication process, amorphous magnetostrictive films of the optimized binary compound Tb0.4Fe0.6 and Sm0.47Fe0.53 were deposited with various thicknesses on the silicon membrane by DC magnetron sputtering using cast composite targets. Magnetic fields lower than 2KOe were applied for micro-system applications. These films have been tested in a simple cantilever arrangement and the predicted magnetostrictions of the actuated membranes through the developed FE models have been calculated.