Thin-film titania templates were fabricated under different processing conditions. The dependencies of pore morphology and pore formation rate on process parameters were evaluated. It was found that under optimized electrolyte condition and anodizing voltage, a self-organized nanostructure consisting of porous TiO2 was obtained. 1 M Na2SO4 solution with the addition of 0.35 wt.% NaF and voltage potential of 30V were used. SEM images of templates showed very thin layer of ~70 nm thickness with worm-like pores. Pore diameter and average pore spacing of center to center on the surface were ~10 nm and 20 nm, respectively. The nanoporous TiO2 thin film will be very useful gas sensing and photocatalytic materials due to their large surface areas and high reactivities.