Paper Title:
Single-Step UV Nanoimprinting Lithography with Multi-Head Imprinting System and Its Applications
  Abstract

The contact-based nanoimprinting lithography (NIL), such as thermal and/or UV nano-imprint, has been well known as one of the next generation lithography alternatives. Especially, the UV nanoimprinting lithography technology has the advantages in terms of process simplicity, low cost, high replication fidelity, and relatively high throughput. The UV nanoimprinting lithography tool is built with the characteristic functions like a self-alignment wafer stage, a nanoimprinting head unit, an alignment system for multi-layer process, stamp/wafer chucking units, releasing unit, and anti-vibration unit, etc. This UV-NIL tool is comprised of UV light source using mercury lamp, ultra-fine XY stage with nano-level positioning accuracy, and self-adjusting flexure stage. The self-adjusting stage has the capability to control 6- axes positions of wafer-holder. The UV-NIL tool can be used for fabrication of some functional nanostructure-patterns i.e. nanosensor electrodes, optical grating patterns and 70nm rectangle patterns.

  Info
Periodical
Key Engineering Materials (Volumes 326-328)
Edited by
Soon-Bok Lee and Yun-Jae Kim
Pages
441-444
DOI
10.4028/www.scientific.net/KEM.326-328.441
Citation
J. J. Lee, S. W. Lee, H. T. Cho, G. H. Kim, K. B. Choi, "Single-Step UV Nanoimprinting Lithography with Multi-Head Imprinting System and Its Applications", Key Engineering Materials, Vols. 326-328, pp. 441-444, 2006
Online since
December 2006
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Price
$32.00
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