Paper Title:
Optical Interferometric Inspection of Surface Contour of MEMS-Components
  Abstract

In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.

  Info
Periodical
Key Engineering Materials (Volumes 326-328)
Edited by
Soon-Bok Lee and Yun-Jae Kim
Pages
47-50
DOI
10.4028/www.scientific.net/KEM.326-328.47
Citation
C. J. Tay, S.H. Wang, C. Quan, "Optical Interferometric Inspection of Surface Contour of MEMS-Components", Key Engineering Materials, Vols. 326-328, pp. 47-50, 2006
Online since
December 2006
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