Optical Interferometric Inspection of Surface Contour of MEMS-Components |
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| Journal | Key Engineering Materials (Volumes 326 - 328) |
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| Volume | Experimental Mechanics in Nano and Biotechnology |
| Edited by | Soon-Bok Lee and Yun-Jae Kim |
| Pages | 47-50 |
| DOI | 10.4028/www.scientific.net/KEM.326-328.47 |
| Citation | Cho Jui Tay et al., 2006, Key Engineering Materials, 326-328, 47 |
| Online since | December, 2006 |
| Authors | Cho Jui Tay, S.H. Wang, C. Quan |
| Keywords | Micro-Accelerometer, Micro-Component, Micro-Electromechanical Systems (MEMS), Micro-Mirror, Optical Interferometry, Single Fiber-End Surface |
| Abstract | In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components. |
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