Calibration of Displacement Sensors with High-Precision and Large Measurement Range Using Temporal Speckle Pattern Interferometry |
| Journal |
Key Engineering Materials (Volumes 326 - 328) |
| Volume |
Experimental Mechanics in Nano and Biotechnology |
| Edited by |
Soon-Bok Lee and Yun-Jae Kim |
| Pages |
91-94 |
| DOI |
10.4028/www.scientific.net/KEM.326-328.91 |
| Online since |
December, 2006 |
| Authors |
Xi De Li,
Yan Yang
|
| Keywords |
Calibration, Displacement Sensor, Temporal Speckle Pattern Interferometry |
| Abstract |
In the present study, a real-time calibration method for micro displacement sensors is
introduced, and a calibration system is developed. SPCM, the sequence pulse counting method
previously proposed by us, is capable of automatically determining both the larger range
displacement and the performance of a sensor, such as the nonlinear error and the displacement
sensitivity within a quarter of the light source wavelength. The new calibration system consists of a
programmable motor driven platform, an out-of-plane sensitive electronic speckle pattern
interferometry (ESPI), and a sequence image acquisition system. The platform is used to provide
displacement changes of a moving component and its displacement is measured by the ESPI and
calibrated sensor synchronously. The calibration accuracy of the proposed method is in the submicrometer
level and the displacement range can be from sub-micrometer to millimeters depending
on the storage capacity of the computer and the correlation property of the interferometer. Three
capacitance-type displacement sensors have been calibrated successfully, whose displacement
ranges are –300μm to 300μm, –30μm to 30μm, and –3μm to 3μm, respectively. |
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