Paper Title:
Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror
  Abstract

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Periodical
Edited by
Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki
Pages
255-260
DOI
10.4028/www.scientific.net/KEM.329.255
Citation
S. H. Yin, H. Ohmori, W. M. Lin, Y. Uehara, "Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror", Key Engineering Materials, Vol. 329, pp. 255-260, 2007
Online since
January 2007
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