Paper Title:
Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy
  Abstract

We have developed the laser nanoprocessing technique by the integration of the fs laser and near-field scanning microscopy (NSOM). The second harmonic femtosecond laser working in the optical near-field with the assistance of NSOM equipment was applied to expose the photosensitive polymer material. The nanopatterns with feature size smaller than the laser wavelength can be fabricated. The optical diffraction limitation is therefore broken through by the near-field nanoprocessing. It was found in our experiment that the nanofabrication feature size depends strongly on the gap between the fiber probe tip and the substrate surface, as well as the laser coupling efficiency. The approach offers the advantages of high precision, speed and selectivity in nanopatterning, and is promising to be used in data storage device manufacture for higher density recording.

  Info
Periodical
Edited by
Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki
Pages
415-420
DOI
10.4028/www.scientific.net/KEM.329.415
Citation
D. J. Wu, J. Zhuang, X. Y. Wang, R. K. Kang, F. L. Zhao, "Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy", Key Engineering Materials, Vol. 329, pp. 415-420, 2007
Online since
January 2007
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$32.00
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