In this work, nonstoicheometric titanium oxide film on silicon matrix was prepared by unbalanced reactive pulsed magnetron sputtering /hydrogen plasma reduction method. The film chemical composition was analyzed by X-ray diffraction and X-ray photoelectron spectroscopy (XPS). The XRD patterns of the prepared films showed that titanium oxide films possess the single phase rutile structure . the XPS spectra of the film displayed that the valence state of Ti is Ti4+, Ti3+ and Ti2+ respectively and the films were nonstoichiomeric Ti-O film. The evidence showed that isolated oxygen exist in films. Ti/O ratio of Ti-O film from the XPS data vary with depth under different reduction temperature and time. And it corresponded with platelet adhesion tests of Ti-O film in vitro. Antithrombotic property of reduced titanium oxide thin films was examined by platelet adhesion tests. The results showed that the Ti-O films with lower non-stoicheometrical extent posses the better anticoagulation property than stoichiomeric TiO2 film and the Ti-O films with higher non-stoicheometrical extent. Hence hydrogen introducing is an effective way to improve the bloodcompatibility of titanium oxide film.