Electrophoretic Deposition Ba_0.65Sr_0.35TiO₃ Thick Films for Tunable Microwave Devices

Pure barium strontium titanate (Ba0.65Sr0.35TiO3) and MnO2-modified barium strontium titanate (Ba0.65Sr0.35TiO3-MnO2) thick films were fabricated by electrophoretic deposition technique. The structures and morphologies of the films were analyzed. The dielectric measurements were conducted on metal-insulator-metal capacitors using platinum as the bottom electrodes and gold as the top electrodes. The dielectric constants and dissipation factors of Ba0.65Sr0.35TiO3 and Ba0.65Sr0.35TiO3-15wt% MnO2 thick films were measured at a frequency of 1 MHz. The tunabilities of 12.5% and 9.3% were obtained for Ba0.65Sr0.35TiO3 and Ba0.65Sr0.35TiO3-MnO2 thick films under an applied electric field of 15 kV/cm, respectively. The dielectric properties of the present thick films were suitable for tunable microwave device applications.