To obtain high performance ceramic matrix composites (CMCs), fiber coatings are often fabricated as the interphase between fiber and matrix. The SiC coating was synthesized at low temperature and reduced pressure in the present experiment. SiC was derived from a gaseous methyltrichlorosilane (MTS)/H2 precursor by chemical vapor infiltration (CVI). The thickness of the coating was inspected by SEM. The correlation between the coating thickness and the depositing conditions, i.e. the deposition temperature, the pressure, the deposition time per pulse and the pulse number were investigated. Based on these work, the C/SiC double-layer coating was fabricated.