Paper Title:
Epitaxial Growth and Electrical Characterization of PBZT Thin Films by RF Magnetron Sputtering Deposition
  Abstract

Barium modified lead zirconate titanate (PBZT) thin films were grown epitaxially on Pt/Ti/SiO2/Si substrates by radio-frequency magnetron sputtering deposition and characterized by X-ray diffraction and scanning electron microscopy. Depending on the growth condition, a wide variation of crystal structure and morphology was evolved in PBZT thin films. The formation of phase structure and pyrochlore phase was strongly dependent on the oxygen partial pressure and re-evaporation of lead from the films during the deposition. Perovskite films were obtained by optimizing the deposition conditions and analyzed by the ferroelectric hysteresis (P~E).

  Info
Periodical
Key Engineering Materials (Volumes 336-338)
Edited by
Wei Pan and Jianghong Gong
Pages
173-176
DOI
10.4028/www.scientific.net/KEM.336-338.173
Citation
H. Q. Fan, L. J. Liu, X. L. Chen, J. Zhang, W. Wang, "Epitaxial Growth and Electrical Characterization of PBZT Thin Films by RF Magnetron Sputtering Deposition", Key Engineering Materials, Vols. 336-338, pp. 173-176, 2007
Online since
April 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: T. Yamane, Satoru Kishida, H. Tanaka, Hideki Yoshikawa, Hiroya Imao
Abstract:We deposited Bi2Sr2Ca1Cu2Oy (Bi-2212) superconducting thin films on MgO substrates with or without Al2O3 particles by the rf magnetron...
159
Authors: S.C. Chen, T.Y. Kuo, Y.C. Lin, Po Cheng Kuo
Abstract:The experimental result shows that the preferred orientations of NiO thin films are closely related to the working pressure of argon. All of...
859
Authors: Fei Xiong Mao, Tao Liu, Shi Wei Liu, Jing Kun Yu
Chapter 16: Sustainable Manufacturing Technologies
Abstract:Mg films were prepared by magnetron sputtering on zirconia substrate. The surface morphology, structure and adhesion performance were...
2834
Authors: Rui Fang Liu, M.B. Sun, W.P. Ding, X.A. Mei
Abstract:Bi3.3Tb0.6Ti3O12(BTT),...
126
Authors: Samsiah Ahmad, N.D.M. Sin, M.N. Berhan, Mohamad Rusop Mahmood
Chapter 7: Surface Engineering
Abstract:Zinc Oxide (ZnO) films were prepared on unheated glass substrate by radio frequency (RF) magnetron sputtering technique and post deposition...
602