Assessment of the Surface Morphology of Diamond Film Based on Fractal

The surface morphology of film material directly affects its physical performance. It is of great significance for finding out its prospective physical performance to characterize the surface morphology of film material. It is hard to characterize them with some conventional methods. The surface morphology of film material was described from the fractal point of view, and the dimension was correlated with the resistivity of material. The [100]-orientated diamond film was primarily investigated. The results show that the greater the crystal grain is, the more uniform and regular the orientation is; and the more compact the arrangement is, the greater the fractal box dimension is. Moreover, when fractal box dimensions were within a certain range approximately from 2.92 to 2.97, it presents positively correlative relation with the logarithm of resistivity, Log(ρ), which resembles the Logistic curve. However, when the other dimensions are beyond the range mentioned above, resistivity doesn’t change with the increase in dimensions of fractal. This study will conduce to illustrating the relationship between the structure of crystal exemplified by arrangement and physical performance as well as material preparation.