The dynamic behavior of a vibration converter of an ultrasonic motor is described using finite element method. Tetrahedral finite elements with three dimensions are formulated with the effects of piezoelectric coupling. And the solution of the coupled electroelastic equations of dynamic motion is presented. The simulated response of the vibration converter is calculated, and shows excellent consistency with experimental results, which proved that finite element modeling is a good approach to optimize piezoelectric apparatus design. A gradual optimized method is employed to ascertain the most compatible structure.