Paper Title:
A Novel Ceramic Pressure Sensor
  Abstract

Constantan thin film was deposited on Al2O3 substrate by vacuum evaporation technology and semiconductor ordinary photolithography to form the sensitive bar of strain-resistance pressure sensor. The static characteristics of the resultant ceramic sensor were measured and the results showed that the linearity, repetition properties, return error and the creep of the ceramics pressure sensor are more excellent than the conventional sensor.

  Info
Periodical
Key Engineering Materials (Volumes 336-338)
Edited by
Wei Pan and Jianghong Gong
Pages
772-774
DOI
10.4028/www.scientific.net/KEM.336-338.772
Citation
Y. Wan, P. Wan, "A Novel Ceramic Pressure Sensor", Key Engineering Materials, Vols. 336-338, pp. 772-774, 2007
Online since
April 2007
Authors
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Price
$32.00
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