Paper Title:
Nanometer Positioning in the Presence of Friction
  Abstract

This paper deals with nanometer positioning in the presence of friction. The object studied is a ball-screw-driven and linear-ball-guide-supported table system. For this system, the friction dominates the resulting performance for micro-motion and the system exhibits microdynamic characteristic which is rather different from macrodynamics. Inherently a controller with high loop-gain is needed to suppress the effect of friction. A PID controller is designed for the table system for step height smaller than 10μm. Experiment and simulation results indicate that the PID controller can provide a sufficiently high-loop gain and effect of friction is suppressed. In point-to-point(PTP) positioning for step heights from 10μm down to 10nm, the positioning error is within ±2 nm and the response dynamics is satisfactory.

  Info
Periodical
Edited by
Shen Dong and Yingxue Yao
Pages
217-222
DOI
10.4028/www.scientific.net/KEM.339.217
Citation
L. H. Lu, Y. F. Guo, H. Tachikawa, Y. C. Liang, A. Shimokohbe, "Nanometer Positioning in the Presence of Friction", Key Engineering Materials, Vol. 339, pp. 217-222, 2007
Online since
May 2007
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Price
$32.00
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