A Study of Measurement Technology for Ultra-Precision Freeform Surfaces |
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| Journal | Key Engineering Materials (Volume 339) |
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| Volume | Progress of Precision Engineering and Nano Technology |
| Edited by | Shen Dong and Yingxue Yao |
| Pages | 417-421 |
| DOI | 10.4028/www.scientific.net/KEM.339.417 |
| Citation | H.F. Li et al., 2007, Key Engineering Materials, 339, 417 |
| Online since | May, 2007 |
| Authors | H.F. Li, Chi Fai Cheung, Ling Bao Kong, Wing Bun Lee, Sandy To |
| Keywords | Advanced Optics Manufacture, Free-Form Surfaces, Measurement Technology, Surface Characterization, Ultra-Precision Machining |
| Abstract | Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented. |
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