Paper Title:
A Study of Measurement Technology for Ultra-Precision Freeform Surfaces
  Abstract

Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented.

  Info
Periodical
Edited by
Shen Dong and Yingxue Yao
Pages
417-421
DOI
10.4028/www.scientific.net/KEM.339.417
Citation
H.F. Li, C. F. Cheung, L. B. Kong, W. B. Lee, S. To, "A Study of Measurement Technology for Ultra-Precision Freeform Surfaces", Key Engineering Materials, Vol. 339, pp. 417-421, 2007
Online since
May 2007
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Price
$32.00
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