The present paper describes the highly efficient and precise ELID grinding method and presents a discussion on the ELID grinding process and the grinding characteristics of several kinds of ceramic materials. The following conclusions are obtained; (1) Good ground surface roughness and accuracy are achieved using the #4000 metal-bonded grinding wheel in through-feed centerless grinding for ZrO2 optical fiber ferrules. (2) Efficient and precise grinding of spherical lens molds with cup wheels using the ELID CG-grinding process was proposed and tested in the present study. (3) The ELID grinding method can be used to fabricate machined surfaces exhibiting desirable characteristics for hard AlN ceramics. The ELID ground AlN demonstrated a surface hardness and sliding characteristics that were superior to those of the polished series. These advantages may be attributable to the diffusion phenomenon of the oxygen element produced by the ELID grinding.