Paper Title:
Thermal Imprint Process of Parylene for MEMS Applications
  Abstract

This study investigated a thermal imprint technique to pattern parylene microstructures over an area of 2525 mm2. A nickel mold having arrays of 25 m-high, 10 m-wide and 1 mm-long lines with 10 m spacing was fabricated using the deep RIE silicon etching followed by the electroplating process. Imprint tests were then carried out under different conditions of temperature, imprint-hold time and applied pressure to investigate a thermal imprint condition for the complete filling of parylene. Good release results without damage or deformation in parylene microstructures were achieved by the help of a release agent in the imprint temperature range of 160 oC to 250oC. With increasing temperature, the depths of imprinted structures increased and their distribution came to be homogeneous. Complete filling was obtained under the imprint temperature of 250oC, applied load of 195 kgf (3 MPa) and imprint hold time of 1800 s.

  Info
Periodical
Key Engineering Materials (Volumes 340-341)
Edited by
N. Ohno and T. Uehara
Pages
931-936
DOI
10.4028/www.scientific.net/KEM.340-341.931
Citation
S. W. Youn, H. Goto, M. Takahashi, M. Ogiwara, R. Maeda, "Thermal Imprint Process of Parylene for MEMS Applications", Key Engineering Materials, Vols. 340-341, pp. 931-936, 2007
Online since
June 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Mu Qin Li, Da Shan Shang, Chen Ma, Shi Qin Yang
Abstract:Bioactive composite coatings containing sub-layer and working-layer with different ingredients were prepared using subsonic thermal spraying...
1619
Authors: Rimma Lapovok
Abstract:Equal Channel Angular Extrusion (ECAE) has become a very popular tool for studying the evolution of microstructure and properties under...
37
Authors: Keishi Yamaguchi, Mutsumi Touge, Takayuki Nakano, Junji Watanabe
Abstract:Silicon carbide (SiC) single crystal has many advantages comparing with silicon single crystal, such as wide band-gap, hardness and various...
282
Authors: Qiang Shen, Chang Lian Chen, Fei Chen, Qi Wen Liu, Lian Meng Zhang
Abstract:Porous calcia stabilized zirconia ceramics (CSZC) with closed pores were presurelessly sintered by adding different contents of zirconia...
435
Authors: Ken Nishida, Minoru Osada, Shintaro Yokoyama, Takafumi Kamo, Takashi Fujisawa, Keisuke Saito, Hiroshi Funakubo, Takashi Katoda, Takashi Yamamoto
Abstract:Micro-patterned Pb(Zr,Ti)O3 (PZT) films with dot-pattern were grown by metal organic chemical vapor phase deposition (MOCVD). Micro-patterned...
135