Various composition of calcium-silicate thinfilms were deposited to the thickness of 1μm by electron-beam deposition. The composition was varied by changing the composition of source. The Si concentration of thinfilm was ranged from 25 at% to 85 at%, evaluated by EDS. The specimens were immersed into PBS solution at 37 °C. Changes of the morphology and calcium phosphate formation on the specimens were examined by SEM. If the concentration of calcium is high, the calcium phosphate was quickly formed on the specimen. However, the calcium phosphate formed on the high calcium oxide concentration exhibited very poor adhesion onto the substrate. There is a range of appropriate calcium oxide concentration to use as a surface modification method for dental or orthopedic implants.