Paper Title:
In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator
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Periodical
Key Engineering Materials (Volumes 345-346)
Edited by
S.W. Nam, Y.W. Chang, S.B. Lee and N.J. Kim
Pages
761-764
DOI
10.4028/www.scientific.net/KEM.345-346.761
Citation
H. Y. Kim, K. S. Woo, Y. J. Choi, Y. S. Oh, "In Situ Monitoring of Residual Strain Using Multilayered Microcantilever in Piezoelectric-Driven Microactuator ", Key Engineering Materials, Vols. 345-346, pp. 761-764, 2007
Online since
August 2007
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