Ca-Ti-O films were prepared by MOCVD using Ca(dpm)2 and Ti(OiPr)2(dpm)2 precursors. The phases, composition and morphology of Ca-Ti-O films changed depending on the molar ratio of Ca to Ti precursors (RCa/Ti), total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub = 973 and 1073 K. CaTiO3 films prepared at 873 K had a dense structure and smooth surface. CaTiO3 films prepared at Tsub = 1073 K had complicated rough surface with a cauliflower-like texture. Hydroxyapatite (HAp) formed in 3 days on the CaTiO3 film prepared at Tsub = 1073 K.