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Morphology of Epitaxially Grown BaRuO3 and CaRuO3 Thin Films by Laser Ablation

Journal Key Engineering Materials (Volume 352)
Volume Innovation in Ceramic Science and Engineering
Edited by Katsutoshi Komeya, Yohtaro Matsuo and Takashi Goto
Pages 315-318
DOI 10.4028/www.scientific.net/KEM.352.315
Citation Akihiko Ito et al., 2007, Key Engineering Materials, 352, 315
Online since August, 2007
Authors Akihiko Ito, Hiroshi Masumoto, Takashi Goto
Keywords Barium Ruthenate, Calcium Ruthenate, Epitaxial Growth, Laser Ablation, Morphology
Abstract

Epitaxial BaRuO3 (BRO) and CaRuO3 (CRO) thin films were prepared on (001), (110) and (111) SrTiO3 (STO) single-crystal substrates by laser ablation, and their microstructures and anisotropy of electrical conductivity were investigated. The (205) (104), (110) and (009) oriented BRO thin films, and (001), (110) and (110) oriented CRO thin films were grown epitaxially on (001), (110) and (111) STO substrates with in-plain orientation, respectively. The (009) BRO thin film and (001) CRO thin film has a flat surface result from a good lattice matching to STO substrates. The (205) (104) BRO thin film and (111) CRO thin film exhibited orthogonal- and hexagonal-shaped texture, respectively. The (110) BRO thin film and (110) CRO thin film showed an island growth due to (110) surface feature of cubic perovskite structure. Epitaxial BRO and CRO thin films have a high electrical conductivity with a metallic conduction, the (111) CRO thin films exhibited the highest conductivity of 1.4×105 S·m-1.

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