Paper Title:
Thermodynamic Analysis of EB-PVD Preparing SiC Coating
  Abstract

The process of Electron Beam-Physical Vapor Deposition (EB-PVD) preparing SiC coating by Electron Beam evaporating 3C-SiC ingot on stainless steel (SS) substrate was firstly discussed as a preliminary estimation from thermodynamic viewpoint. The results show that, with the temperature increasing from 2500 to 3400 K, the purity of SiC coating increases from 0.58 to 0.734.

  Info
Periodical
Key Engineering Materials (Volumes 353-358)
Edited by
Yu Zhou, Shan-Tung Tu and Xishan Xie
Pages
1663-1666
DOI
10.4028/www.scientific.net/KEM.353-358.1663
Citation
X. D. He, J. Yi, Y. Sun, Y. Li, "Thermodynamic Analysis of EB-PVD Preparing SiC Coating", Key Engineering Materials, Vols. 353-358, pp. 1663-1666, 2007
Online since
September 2007
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Price
$32.00
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