Titanium oxides films were deposited on tensile sample and vascular stents made of 316L stainless steel by unbalanced magnetron sputtering. The effects of structures, deposition temperature, Ti interlayer and thickness on the adhesion of titanium oxide films were investigated by tensile tests. The results revealed that the structure of the Ti-O films affect their adhesion dramatically. TiO film is brittle and fragile, lacking ability of deformation. Therefore its adhesion was worse than that of TiO2 film. The higher substrate temperature was helpful to improve adhesion of film, the adhesion of the TiO film deposited at 673K was better than those of the TiO films deposited at 323K and 473K. The adhesion of the TiO film with Ti interlayer was better than the one without interlayer. The introduction of Ti interlayer was beneficial to adhesion of film. The adhesion of thinner TiO2 film was better than that of thicker one. TiO2 film deposited on stents had good adhesion. After expansion, the film didn’t crack and peel off. TiO2 film has potential application on the vascular stents for improving its blood compatibility.