Paper Title:
Damping Analysis of Asymmetrical Comb Accelerometer
  Abstract

The resonance phenomenon is suppressed by adjusting the damping of the comb accelerometer structure to widen the frequency bandwidth of the capacitive accelerometer. The capacitive accelerometer with asymmetrical combs, fabricated with DRIE and anodic bonding, is presented. The damping category of the accelerometer is introduced, in which the squeeze-film damping coefficient and the damping ratio factor are detailed. The damping ratio factor of the accelerometer, measured by a vibration method, is 0.17. The damping ratio factor of the optimized structure is calculated of 0.15 to 0.18 with the change of experiential modulus C from 25 to 30, theoretically.

  Info
Periodical
Key Engineering Materials (Volumes 353-358)
Edited by
Yu Zhou, Shan-Tung Tu and Xishan Xie
Pages
2597-2600
DOI
10.4028/www.scientific.net/KEM.353-358.2597
Citation
W. P. Chen, Z. G. Zhao, X. W. Liu, Y. M. Lin, "Damping Analysis of Asymmetrical Comb Accelerometer", Key Engineering Materials, Vols. 353-358, pp. 2597-2600, 2007
Online since
September 2007
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Price
$32.00
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