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Thermal Deformation Analysis of Copper Microbridges with Speckle Interferometry and Finite Element

Journal Key Engineering Materials (Volumes 353 - 358)
Volume Progresses in Fracture and Strength of Materials and Structures
Edited by Yu Zhou, Shan-Tung Tu and Xishan Xie
Pages 2871-2874
DOI 10.4028/www.scientific.net/KEM.353-358.2871
Citation Zhao Zhang et al., 2007, Key Engineering Materials, 353-358, 2871
Online since September, 2007
Authors Zhao Zhang, Xi De Li, Wen Shen
Keywords Microbridge, Speckle Interferometry, Thermal Deformation
Abstract

In this paper, a speckle microinterferometric system was employed to study the thermal deformation of the Cu microbridges with different dimensions. The deflections of the microbridges caused by the thermal loading were measured with real-time by the speckle microinterferometric system and the surface temperatures of the bridges were recorded using a digital thermometer. The deformation evaluation after microbridges buckling was also recorded with our testing system. Then, the experimental results were compared with the finite element analysis (FEA).

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