Paper Title:
Micro/Nano Film Getters for Vacuum Maintenance of MEMS
  Abstract

Vacuum packaging is very important for some micro-electro-mechanical systems (MEMS) devices to perform their basic functions properly and to enhance their reliability by keeping these devices away from harmful external environment. In order to maintain high vacuum in a cavity of MEMS devices, residual gases and leaking gases must be eliminated by embedded getter materials. Micro/Nano film getters absorbing gases inside the tiny cavity of MEMS packaging were introduced in this paper. The fabrication and characterization of micro/nano getters for MEMS applications were also presented. Various kinds of patterned getter films were prepared for different MEMS applications. The activation temperature and sorption capacity of the nonevaporable getter (NEG[1]) films was investigated. The formation of micro/nano films on the inner surface of MEMS devices is totally compatible with Si-based MEMS process and illustrates the applicability of the technique in vacuum maintenance of MEMS devices.

  Info
Periodical
Key Engineering Materials (Volumes 353-358)
Edited by
Yu Zhou, Shan-Tung Tu and Xishan Xie
Pages
2924-2927
DOI
10.4028/www.scientific.net/KEM.353-358.2924
Citation
Y. F. Jin, H. Tang, Z. F. Wang, "Micro/Nano Film Getters for Vacuum Maintenance of MEMS", Key Engineering Materials, Vols. 353-358, pp. 2924-2927, 2007
Online since
September 2007
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Price
$32.00
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