Research on Nanoscale Material Removal Process Using Atomic Force Microscopy

Nanomachining tests have been conducted on single-crystal Al using atomic force microscope to simulate single-blade machining process of single gain. The influences of nanomachining experimental parameters (lateral feed and velocity) on the properties of engineering surface, material removal and chip formation were studied. Results indicated that the cutting depth of nanomachined surface increased as the lateral feed decreased. Insensitivity of cutting depth to velocity at same normal load was revealed. The different chip behaviors of nanomachined surface were investigated through scanning electron microscope (SEM). Results indicated that different lateral feeds caused different chip behaviors. Three typical chip behaviors were characterized as the lateral feed increased. In addition, the chip behavior and the volume of material removed were observed having no evident linear transformation with the evolution of the velocity by SEM graphics. Furthermore, it was concluded from the chip behaviors in nanomachining process that the material at high loads was removed by plastic deformation with no fracture or crack happened.