Paper Title:
Fabrication of Micro-Grating Structure on Glazed Stainless-Steel by Two-Beam Holographic Method Using Nanosecond Laser Pulses
  Abstract

A new method of etching micro-grating structures (MGSs) on the surface of glazed stainless-steel directly is reported, which makes good use of the interference of nanosecond laser pulses. Through changing the experimental parameters such as working current of the laser and source beam diameter, the influences of these parameters on the depth of grooves and duty cycle of MGSs are analyzed. The results measured with conventional optical microscopy and atomic force microscopy (AFM) show that the depth of grooves of MGSs varies from 0 nm to 350 nm, the duty cycle of MGSs changes between 0.4 and 0.9, This method can be used to make a stencil-plate for nano-imprinting. It extends the application of nanosecond laser in laser-induced microstructures, and provides a new method for micromachining micro-optical component.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
1133-1137
DOI
10.4028/www.scientific.net/KEM.364-366.1133
Citation
H. Zhang, Y. Zhou, L. S. Chen, "Fabrication of Micro-Grating Structure on Glazed Stainless-Steel by Two-Beam Holographic Method Using Nanosecond Laser Pulses ", Key Engineering Materials, Vols. 364-366, pp. 1133-1137, 2008
Online since
December 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Y.J. Chen, Kuang Chao Fan, Y.S. Liu, F. Cheng
Abstract:An innovative high precision optical focus probe has been developed to measure the grating pitches. This probe uses characteristics of FES...
200
Authors: Xiao Dong Xu, X.J. Liu
Abstract:In this paper, a perpendicularly overlapped transient thermal grating (TTG) method is proposed to characterize the weakly absorptive or...
259
Authors: Shou Hua Wang, Hong Bin Yu, Fook Siong Chau, X.S. Tang
Abstract:In this paper, we present a Fourier Transform micro-spectrometer which works based on a lamellar grating interferometer. The spectrometer...
211
Authors: Min Jin Tang, Hui Min Xie, Jian Guo Zhu, Peng Wan Chen, Qing Ming Zhang, Xiao Jun Li
Abstract:Moiré grating is a basic optical component, and can be used in various moiré methods. The conventional grating fabrication technology is...
7
Authors: Xing Hui Li, Yuki Shimizu, Hiroshi Muto, So Ito, Wei Gao
Chapter 9: Precision Metrology
Abstract:A compact optical three-axis surface encoder, which can detect displacements in the XYZ-directions simultaneously by employing a scale...
913