Analysis on Anti-Vibration Characteristic of Synchronism Phase-Shifting

Vibration is the biggest problem for precise on-line surface measurement. In order to investigate the possibility for phase-shifting interference technique to be applied to precise on-line surface measurement, a synchronic phase-shifting technique is proposed. Its anti-vibration characteristics are analyzed and a vibration table to simulate different vibration conditions is set up, on which many experiments for surface measurement under different vibration conditions are conducted. The analysis and experimental testing verify the excellent anti-vibration characteristics of the interferometer for on-line precise surface measurement.