Paper Title:
The Application of Motif Characterizing Method in the Surface Topography Evaluation of MEMS Device
  Abstract

The surface topography characterization of MEMS device is very important to bonding technology of MEMS device. Motif characterizing method is a characterizing method of surface topography by graph. Aiming at the diversity and regionality of surface topography of MEMS device, in this study we have sampled the surface of MEMS device by 3-dimentinal grids using the surface profiler developed by us and characterizes the surface topography of MEMS device by the extended Motif characterizing method. The surface of MEMS device is divided into several Motif regions; the surface topography of every divided region can be evaluated respectively; the details of every region can be zoomed and these regions as a whole or every region can be revolved and projected; one of these regions can be as the reference of other regions. So the height, gradient and other characteristics of others regions of the whole MEMS device surface can be analyzed relative to the reference region; the whole and local surface topography of whole MEMS device can be analyzed.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
210-214
DOI
10.4028/www.scientific.net/KEM.364-366.210
Citation
S. H. Wang, T. B. Xie, X. D. Yang, "The Application of Motif Characterizing Method in the Surface Topography Evaluation of MEMS Device", Key Engineering Materials, Vols. 364-366, pp. 210-214, 2008
Online since
December 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Yan Hui Liu, Ping Tan, Fu Lin Zhou, Yong Feng Du, Wei Ming Yan
Abstract:Based on the configuration and mechanical characteristics of piezoelectric actuator, the bidirectional piezoelectric variable friction...
2977
Authors: Ning Wan, Chun Sheng Guo, Shi Wei Feng, Guang Chen Zhang, Zhou Zhou
Microelectronic Technology
Abstract:The method of evaluation of VDMOS storage failure rate is presented and explained in this paper. To obtain a large number of devices working...
1149
Authors: Hong Zhang, Ren Zhong Zhou
Chapter 2: Bridge Engineering
Abstract:Techniques of lifting large segments of steel box girder by floating crane is used in construction of Chongqi Bridge. Considering the...
1094
Authors: Chuan Zhi, Zhi Jian Li, Yi Shi
I. Color Science and Technology
Abstract:The nature of device color characteristic methods is the mutual conversion of device-dependent color space and device-independent color...
65
Authors: Shu Guang Liu
Chapter 9: Applied Mechanics and Mechanical Engineering
Abstract:Seed-filling device of plot seeder is the research object. Influences of the four test factors (motion velocity (v), rotation speed of...
1266