Paper Title:
Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand
  Abstract

MEM (Micro-Electro-Mechanical System) is the integration system of mechanical elements, sensors, actuators, and electronics on a silicon substrate using the micro fabrication technology, in general. A new MEMS formation technology is proposed in this paper. The improved drop-on-demand ink jet was used and the MEMS was formed on the plastics and silicon substrate. The plastics resins were injected from the drop-on-demand head on the substrate and the dropped resins were cured using ultraviolet rays. Thus micro lenses were formed.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
30-34
DOI
10.4028/www.scientific.net/KEM.364-366.30
Citation
M. Nagao, H. Okabe, K. Oyoshi, S. Sakano, "Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand", Key Engineering Materials, Vols. 364-366, pp. 30-34, 2008
Online since
December 2007
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Price
$32.00
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