Paper Title:
A Contact Stylus Profilometer Based on Linnik Interference Microscope
  Abstract

We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
371-376
DOI
10.4028/www.scientific.net/KEM.364-366.371
Citation
J. P. Yun, L. L. Zhang, T. B. Xie, G. Y. Hu, "A Contact Stylus Profilometer Based on Linnik Interference Microscope", Key Engineering Materials, Vols. 364-366, pp. 371-376, 2008
Online since
December 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xu Dong Yang, Jia Chun Li, Tie Bang Xie
Abstract:A novel profilometer for three-dimensional (3D) surface topography measurement is presented. The profilometer has large measuring range,...
750
Authors: Fang Jung Shiou, Y.W. Deng
Abstract:A fan-shaped laser beam scanning measuring system based on the triangulation principle, was newly developed in this study to measure...
233
Authors: Claudia Secrieru, Ion Dumitru
Abstract:The article focuses on the technical measurements which could be applied to the fracture surfaces of the steel Charpy specimens in order to...
43
Authors: Fang Jung Shiou, Hsin Ju Chen, Chia Hao Hsu
Abstract:Precision noncontact measurement of the print-through phenomenon (PTP) of the fiber-reinforced plastics (FRP) is an urgent problem to be...
131
Authors: Shou Bin Liu, Zhan Ping Li
Chapter 4: Measurement Technology and Instruments
Abstract:The core component of profilometer is a stylus displacement measuring system, whose resolution reaches nanoscale. Since the stylus tip is...
301