Paper Title:
Single-Point Diamond Turning of Aspheric Mirror with Inner Reflecting Surfaces
| Periodical | Key Engineering Materials (Volumes 364 - 366) |
|---|---|
| Main Theme | Optics Design and Precision Manufacturing Technologies |
| Edited by | Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO |
| Pages | 39-42 |
| DOI | 10.4028/www.scientific.net/KEM.364-366.39 |
| Citation | Kwon Su Chon et al., 2007, Key Engineering Materials, 364-366, 39 |
| Online since | December, 2007 |
| Authors | Kwon Su Chon, Yoshiharu Namba, Kwon Ha Yoon |
| Keywords | Aspheric Mirror, Figure Error, Single-Point Diamond Turning, Surface Roughness (SR), X-Ray Optics |
| Price | US$ 28,- |
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Abstract
Grazing incidence optics used in soft X-ray microscopes require supersmooth surface and highly accurate figure. We considered the fabrication of a Wolter type I mirror, one of grazing incidence optics, with axial-symmetric inner reflecting surfaces using single-point diamond turning. Electroless nickel was chosen as reflecting material Cutting conditions for machining the inner reflecting surface were restricted because of long arm of a single-crystal diamond tool. The machined Wolter type I mirror had approximately 270 nm P-V in figure error and 3 nm Ra in surface roughness. The direct-machined Wolter type I mirror could be successfully used in a soft Xray microscope based on laser-produced X-ray source.
