Paper Title:
Method of Analyzing the Singlet F-Theta Scan Lens for Laser Drilling System
  Abstract

The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
521-526
DOI
10.4028/www.scientific.net/KEM.364-366.521
Citation
M. F. Chen, Y. P. Chen, C. W. Hu, C. C. Chen, "Method of Analyzing the Singlet F-Theta Scan Lens for Laser Drilling System", Key Engineering Materials, Vols. 364-366, pp. 521-526, 2008
Online since
December 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jong Woong Kim, Sun Kyu Park, Seung Boo Jung
Abstract:Ball shear test was investigated in terms of effects of important test parameters, i.e. shear height and shear speed, with an experimental...
851
Authors: S.M.H. Seyedkashi, Golam Hosein Liaghat, Hassan Moslemi Naeini, M. Hoseinpour Gollo
Abstract:Tube hydroforming technology is still considered a new technique growing fast in automotive and aircraft industries. Many researches on all...
133
Authors: Hao Zhang, Jian Song, Ming Cong
Chapter 1: Advanced Mechanical Engineering and Novel Devices
Abstract:Machining simulation can quick supply valuable data to help improving machine processing quality and efficiency. And it is playing an...
8
Authors: Chih Ta Yen, Ing Jr Ding, Jyun Min Shih
Chapter 7: Contemporary Development for Optical Engineering, Image Processing, Quality and Analysis, Measurement, Instrumentation and Detection Technologies
Abstract:This paper proposes compensation method with liquid lens as field lens in 9x zoom lens intermediate optics. According to the droplet shape...
1245