Paper Title:
Analysis and Optical Design of 1:1 Projection Lithography System
  Abstract

For the 1:1 laser projection lithography system used to achieve large-area patterning with higher resolutions as well as higher throughput, the key parameters such as the laser beam geometry, the numerical aperture of projection lens, the laser source power and the pulse repetition rate are theoretically analyzed. It is expounded the process of uniform exposure in hexagonal beam shape, the advantages and limitations of 1:1 projection owing to numerical apertures deciding the resolution, as well as the cause of choosing larger laser power and pulse repetition rate. Meanwhile, the projection lens for a unit-magnification, refractive imaging system is tentatively simulationdesigned using ZEMAX optical design software. The optimized three-dimensional layout is plotted. For the designed results, the maximum optical path difference is smaller thanλ /4 within entire visual field. The resolution for feature sizes 10μm can be achieved within depth of focus 400μm by evaluating MTF. The maximum field curvature is within 10μm and the maximum distortion is small than 0.000007%. This fulfills the demands in technical specifications.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
533-538
DOI
10.4028/www.scientific.net/KEM.364-366.533
Citation
Q. H. Lin, J. Y. Zhou, W. J. Li, "Analysis and Optical Design of 1:1 Projection Lithography System", Key Engineering Materials, Vols. 364-366, pp. 533-538, 2008
Online since
December 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Sheng Zhi Li, Hai Yan Bao, Zhi Chao Zhang, Yang Hua Li, Gong Ming Long
Abstract:the aid of commercially available software MSC.SuperForm, a 3-D finite element model has been established to simulate the rolling process of...
1614
Authors: Xiao Shen, Li Fu Zhuang
Chapter 6: Advanced Machinery and Equipment
Abstract:Based on the observation and research of the macroscopic and microscopic foot pad of tree frog, we analyzed the influence of the surface...
584
Authors: Xi Chang Wang, Shui Li Gong, En Ming Guo, Hai Yan Zhao, Heng Dong Xu
Chapter 2: Surface Engineering/Coatings
Abstract:Electron beam surfi-sculpt is a new metal surface processing technology, which is potentially used in many areas. In this paper, forming...
772
Authors: Zhi Yuan
Chapter 6: Computer-Aided Design, Manufacturing, and Engineering
Abstract:This paper proposed an artificial neural network (ANN) based space vector pulse width modulation (SVPWM) for motor drive which fully covers...
1002