Paper Title:
Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification
  Abstract

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Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
555-559
DOI
10.4028/www.scientific.net/KEM.364-366.555
Citation
K. Hu, X. Q. Jiang, X. J. Liu, "Recognition of MEMS Microstructure Feature Based on Pattern Analysis and Classification", Key Engineering Materials, Vols. 364-366, pp. 555-559, 2008
Online since
December 2007
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