Paper Title:
An Improved Data Processing Method in Differential White Light Spectral Interferometry for the Measurement of Thickness of Ultra-Thin Metallic Foil
  Abstract

The accurate thickness measurement of Ultra-thin rolling metallic foil has an important role in industrial or some special applications. Unfortunately, commercial thickness meters do not provide high precision measurements non-destructively. A new spectral-domain interferometric method for measuring absolute thickness of Ultra-thin metallic foil is proposed here. The thickness is measured by differential white light spectral interferometer. Two differential Michelson Interferometers (MI) are used as basic measuring system to obtain the spectral interference fringes on the spectrometers. The spectral interference between both beams, which shows up a periodic modulation of the source spectrum with the period dependent on the OPD, serves as an illustration of a technique for measuring both OPDs and displacements in a range dependent on the source spectrum width. Therefore, the interference fringes only depend on the OPD due to the thickness of metallic foil and are unrelated to the position of the foils in the system, which is insensitive to the vibration. The spectral interference fringes are resolved over a wide spectral range and the absolute thickness of metallic foil can be calculated by measuring the OPD with a modified extremum method based on the least root mean square (RMS) deviation. The theoretical analysis and preliminary experiments indicate that the technique can measure the thickness of foils in the range of 1μm to 80μm, and it requires less than 50ms within the single measurement. Experimental results are presented.

  Info
Periodical
Key Engineering Materials (Volumes 364-366)
Edited by
Guo Fan JIN, Wing Bun LEE, Chi Fai CHEUNG and Suet TO
Pages
560-565
DOI
10.4028/www.scientific.net/KEM.364-366.560
Citation
Y. L. Du, H. M. Yan, X. D. Zhang, "An Improved Data Processing Method in Differential White Light Spectral Interferometry for the Measurement of Thickness of Ultra-Thin Metallic Foil ", Key Engineering Materials, Vols. 364-366, pp. 560-565, 2008
Online since
December 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Guo Qiang Li, Yong Qin Liu, Wen Jiang Liu
Chapter 2: Mechanical Engineering and Manufacturing Technology
Abstract:As the optimum of extremum value control system drifts faster it may make bigger error for pre-estimating statically the optimum, it is...
176
Authors: Guang Rui Li
Chapter 6: Algorithm Design
Abstract:An efficient and robust star acquisition algorithm based on facet fitting is presented to improve the performance of star sensors. The...
1747
Authors: Hong Wang
Chapter 2: Information Technologies Application for Manufacture, Data Processing
Abstract:A Knapsack Problem is a typical NP complete problem. For solving Knapsack problem, A new improved Particle Swarm Optimization algorithm was...
266
Authors: Wen Bang Sun, Hai Yan Tang, Yan Chang, De Bao Zhang
Chapter 4: Data Processing and Applied Computational Methods and Algorithms
Abstract:Nowadays, Hough transform is always adopted to detect the seam-line of mosaic image. But the calculation is big, so the seam-line detection...
3894