Paper Title:
XPS Studies on ZrO2 Thin Films Deposited on Glass Substrate by Sol-Gel
| Periodical | Key Engineering Materials (Volumes 368 - 372) |
|---|---|
| Main Theme | High-Performance Ceramics V |
| Edited by | Wei Pan and Jianghong Gong |
| Pages | 1277-1279 |
| DOI | 10.4028/www.scientific.net/KEM.368-372.1277 |
| Citation | Xin Gang Yu et al., 2008, Key Engineering Materials, 368-372, 1277 |
| Online since | February, 2008 |
| Authors | Xin Gang Yu, Yi Gong, Wen Yue Bi, Xue Chun Tian, Hong Wen Ma, Hui Feng Zhao, Guo Hong Qiu, Li Wang |
| Keywords | Sol-Gel (SG), XPS, ZrO2-CeO2 Thin Film |
| Price | US$ 28,- |
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Abstract
The chemical composition and the valence state of elements on the surface of ZrO2 thin films deposited on glass substrates have been studied by X-ray photoelectron spectroscopy. Results show that: elements of Na, Mg, Zr, Ca exist in the form of their respective stable state, such as Na2O, MgO, ZrO2, CaO, when heat treated at 500°C for 0.5h; but Si is unstable, and exhibit stoichiometrical disturbances. Results of chemical composition and their content by atom percent of ZrO2 thin films surface reveal that: Si, and Ca diffuse from glass to the thin films in scale; Na diffuses few and Mg collects to the thin films surface. The diffusion of Mg2+ and Ca2+ from glass to ZrO2 thin films is negative diffusion.
