Paper Title:
An Investigation of Structure and Wear Properties of TiN/NbN Films Deposited by Reactive Magnetron Sputtering
  Abstract

TiN/NbN multilayers on steel substrates (SKD11) are produced using DC magnetron sputtering process. The multilayer obtained are characterized in composition by means of X-ray diffraction techniques, Microhardness and adhesion to the substrate were studied by atomic force microscopy and scratch tests. The morphological analysis and coating structure are studied using scanning electron microscopy, and atomic force microscopy. The film thickness is measured by a stylus profiler (XP-2 stylus profiler). Wear tests were performed on pin-on-disk configuration and dry sliding conditions, at 5N load by using hardened steel ball. On mechanical properties, higher Young’s modulus and hardness values follow to increase the TiN/NbN layers number. The multilayer films of 64 layers at 500°C 1h annealing indicated that the microhardness and Young’s modulus had the highest values.

  Info
Periodical
Key Engineering Materials (Volumes 368-372)
Edited by
Wei Pan and Jianghong Gong
Pages
1310-1312
DOI
10.4028/www.scientific.net/KEM.368-372.1310
Citation
C. C. Liu, M. H. Weng, C. T. Wang, J. H. Chen, Y. C. Chou, H. W. Yaw, "An Investigation of Structure and Wear Properties of TiN/NbN Films Deposited by Reactive Magnetron Sputtering", Key Engineering Materials, Vols. 368-372, pp. 1310-1312, 2008
Online since
February 2008
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$32.00
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